| The flat panel displays(FPDs) are dominating the current display industry. The market of FPD products in2011has grown10percent over last year. The most popular FPD technology is the thin-film transistor-liquid crystal display (TFT-LCD), which takes more than the80percent share of the FPD market. The method of realizing the brilliant color in TFT-LCDs is based on the color filters. The quality of the color filters can significantly influence the performance of TFT-LCDs. In order to achieve high quality color filters with higher resolution and low cost, the transfer printing process was developed.The transfer printing method is a relatively new technology in the mass-production of TFT-LCDs. The laminator transfers the photoresist layer in the roll film form to the glass, which then goes through the UV exposure and developing processes for forming the color filters finally. The formed color filters by the transfer printing process have better layer shape and uniformity attributed to the unique design of the film to be transferred. The finely controlled lamination process can help to achieve high resolution color filters, but could also induce some defects, such as the common defects due to the residues generated in the transfer film peeling, and abnormal PS pillars due to long waiting time after the transfer processes. In this thesis, various characterization methods are used to analyze the defects, and related processes are developed to reduce them. For instance, SEM and EDS are used to analyze the common defects, and a blower system is added into the peeling process to effectively reduce the common defects. SEM is used to analyze the the PS residues, which are found to be the remains of the developer liquid. And then through multiple-condition test, the Flushing method is shown to be an effective way to reduce the PS residues. With the methods developed in this thesis, the yield was improved, benefiting the company’s revenue. |
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