Preparation Of IRFPA Integrated Micro Lens

In order to meet domestic demand for IRFPA packaging under vacuum, we attempt to find better integration of manufacturing and packaging and more efficient use of IRFPA microlens.A novel structure of microlens-micromirrors array (MMA) with100%fill factor and smooth surface profile has been fabricated. we experimental study it.We describes the three methods, design and verify the MMA is more suitable for infrared light, and has potential to integrate with IRFPA. The device is easier to vacuum integrate with IRFPA by half-hybrid method, which decreases the waste of incident light. we fabricate a SU8photoresist microlens array on the single-polished silicon substrate by thermal reflow method, the microlens has a square bottom with size of25μm, the distance between every two adjacent microlens is5u m. Secondly, we transfer the photoresist microlens array to the silicon substrate by the mixed gases of SF6and02dry etching to get the silicon microlens array with no gaps. In this paper, the quantities of SF6and O2are200sccm and50seem respectively, the etching ratio between SU8-2005photoresist and silicon is1:1.44. The focal length of microlenses is15.4μ m to16.6μm, the roughness of mcirolens is about10nm; Use KOH anisotropic etching, deposition, thermal reflow and hot extrusion to fabricate the new MMA with high fill factor nearly100%and good optical properties.