Study Of The Optical Characteristics And The Fabrication Technology Of Refractive Microlens And Microlens Arrays

With the development of science and technology, modern apparatus and equipment are developing towards optic, mechanical and electric integration. The elements fabricated by traditional methods last long periods and these elements are large in size and heavy in weight, so that they could not satisfy the needs of modern science and technology. In these days, micro-optics is becoming a new developing direction of modern science and technology because the microlens and microlens array are small in size, light in weight and easy to be integrated. With the development trend of fabricating small size optical elements, many new techniques have been developed and microlenses and micrlens arrays have been fabricated in millimeter, micron and nanometer size which are classified into two classes as diffractive type and refractive type. Refractive microlenses and microlens arrays could be divided into two classes by their sizes which are submicron microlenses and microlens arrays and traditional ones. The second chapter in this paper studies the optical characteristics of submicron microlenses by adopting Mie scattering theory, and the eikonal approximation method is also adopt to study the optical properties of micrometer body-of -revolution microlens. The third chapter studies the submicron microles arrays by adopting rigorous coupled wave method, and this kind of microlens arrays are proved to be capable of reduce reflectance, so that a new application field is found. The fourth chapter studies the technique of fabricating microlens by melting photoresit, and the new technique of reducing development time to increase the F number and fill factor of microlens arrays is invented. The holography-ion beam etching(IBM) method to fabricate blazed grating is studied and the holography-melting photoresist-IBM technology to fabricate cylinder microlens arrays is invented, and the experiment result are proved to be pretty.