Study Of Optical Property And Fabrication Of Soft Microlens Array

Recently, due to unique flexibility and ductility of soft microlens array, flexibleoptoelectronic system has wide application prospect in the foldable and flexibleimaging system and the portable solar cell. So it is necessary doing related researchfor soft microlens array one of the important microoptics element of the softphotoelectric system. In this paper, based on the DMD (Digital Micromirror Device)digital photolithography system, the method of fabricating soft microlens array isdescribed and measurement and analysis about the produced soft microlens array aregiven in detail. The main works are as follows:Firstly, the history development, the present situation of microlens array, thefabricating method of the microlens array and the application prospect of the softmicrolens array are described. introduce a few of means of photolithography such asdirect writing, binary set carved technology, gray scale mask technique and digitallithography technology and so on, as well as the the advantages of soft PDMSmicrolens array,a outline for this paper is also provided.Secondly, introduces the method of how to use the technology of using computercontrol maskless digital lithography technology to make microlens array. In thefoundation of understanding the basic theory of scalar diffraction, the method ofdesigning refraction microlens is introduced. According to the type of photoresist andparameters and the situation of laboratory equipment instrument, the arrangement ofsoft and alveolate microlens array with decreased duty ratio is designed. MATLABand CorelDRAW are used to draw the mask of soft microlens array.Thirdly, this paper presents making soft microlens array based on digital masklithography system, analysis the operating principle of each part of the DMD digitalprinting system and the contourgraph in detail, presents the experimental steps ofexperiment and the parameters of the test instruments, presents the result of theexperiment and does test and analysis for soft microlens array.Finally, tested refractive index of soft microlens array and studid its partialoptical properties, calculated the focal length of soft microlens array. Did light field test for soft microlens array, in this paper, deformation of soft microlens array waspreliminary analysised as soft microlens array will produce deformation under theaction of external force in the application.