| This project is granted by the project of the National Basic Research Program of China (973Program) and the NSFC-Guangdong Joint Fund (Contract No. U0934004).As a rely on the converse piezoelectric effect of piezoelectric materials, the ultrasonic motor is anew micro-motor with the unique properties: small size, fast response, self-locking power-off. Thenmulti-dof ultrasonic motor with high machinery integration will have broad application prospects in theprecision machinery and the precision machining fields. This project is about two-dof piezoelectricactuators, and to build the two-dimensional motion platform using them. There is a measuring systemdesigned for the two-dimensional motion platform. The following are the primary content:Through investigation, the development process and the research status of current multi-freedompiezoelectric actuators are found out, and the existing technique characteristics of the multi-dimensionalmotion are analyzed.Two-dof piezoelectric actuator with symmetric structure is researched, the working mechanism,modal analysis and harmonious response analysis. The manufacturing principle prototype is basicallyconsistent with the theoretical analysis by modal experiment.A kind of2-d motion platform is designed, which uses two groups of guide rails as orientation onorthogonal direction and is driven by two-dof piezoelectric actuator. Experiments show that two-dofpiezoelectric actuators can drive effectively the platform for two-dimensional motion. Because of thedifferent motion mass in both directions, movement velocity in both directions is obviously different.In response to these issues, there is a structure with single plate designed. Without guidemechanism, the two-dimensional platform driven by only one motor own compact structure and theshort transmission chain, which is expected to achieve higher reliability and stability.PSD photoelectric position sensor is used as the displacement detection of motion platform andDSP controller used as positioning control, to avoid the usual set of two rating detection scheme, due tothe installation error leading to the detection error increasing.Experiments show that the design scheme is feasible that two-dof piezoelectric actuator directlydrives the platform, but also that structure design details, parts processing technology and relatedcontrol methods should be further optimized. |
