Research On Excimer Laser Eatching Ceramics Materials

Nuclear main pump is the heart equipment of the nuclear power plant. So far, the nuclear main pump is completely dependent on imports, which became a huge obstacle to the development of Chinese nuclear power industry. Nuclear main pump seal ring works in extremely evil environment. And the materials that possess excellent physical and chemical properties were used to meet the rigorous requiement. But the excellent hardness and brittleness of the ceramics make dilemma to the traditional processing. The traditional processing can not reach the seal ring’s technical requirement. Excimer laser which has high machining precision, good controllability, good processing quality, has obvious advantage in microprocessing hard and brittle ceramic materials.The ceramics was etched use excimer. The phenomena and processing problems were researched and analysised in this paper. The ceramic etching processing technology of the excimer laser was deeply studied. And its processing mechanism were analyzed and discussed. The main contents of this paper as follows:First, by analyzing the processing characteristics of excimer laser etching and sealing ring surface technical requirements, as well as ceramic seal ring material physical and chemical properties, the processing parameter variables was promoted in the way of slice layer control. And the processing track was simulated.Second, according to the excimer laser beam propagation characteristics, energy stability, energy distribution and etching result, laser etching platform was designed and optimized to meet its requirement.Then, the processing experiment of KrF excimer laser etching ceramic was carride out on the laser etching platform. The experiment result showed that the pulse number, the spot energy density and the spot overlap rate have obvious influence to the etching depth and surface roughness. And the influence showed linear tendency.Finally, by analyzing the processed ceramic surface morphology, grain size and distribution and composition, and comparing with Al2O3ceramic and sapphire which have the same crystal structure, the paper worked out that good processing effect was based on the structure of the ceramic which has fine and uniform particle. Laser processing had no effect on the material’s organizational structure and surface stress. It showed unique advantages of excimer laser processing of ceramic materials.