Experiment Research On The Excimer Laser Micro-machining

Micro-spheres perturbation target is a kind of laser target which has special constitution. And it is significant for the research on Rayleigh-Taylor Unstability in the ICF(Inertial Confinement Fusion) experiment. Manufacturing technology of micro-spheres perturbation target is an important part of ICF research, the key difficulty is micro-machining on the surface of a HGM(Hollow Glass Micro-spheres) and engendering scheduled perturbing stripe. Inasmuch as HGM's physical peculiarity such as exterior, material, etc, excimer laser etching was selected to machine micro-spheres perturbation target after analyzing some kinds of micro-machining technologies in this thesis.Firstly, some technologies and equipments in the relative realm of excimer laser and micro-machining technology were introduced. Especially, the configuration of parts of the MAESTRO excimer laser workstation was analyzed in detail. After that, this thesis introduced HGM's manufacturing methods and the mensuration of its physical characteristics. The environment of manufacturing and method of HGM's drawing were selected. Small volume, limiting mechanical performance and fragility of HGM make it very difficult to machine the HGM. Therefore, combining with the precondition of micro-etching, the schemes of two different kinds of special clamping devices were brought forward in this thesis, one kind was based on HGM excimer direct writing, and the other was based on masked machining technics.Secondly, among the considerable factors during the course of designing the experimental research, the parameters of laser machining technics and optical performance of Beam Delivery System (BDS) were analyzed and discussed. Based on the work above, an machining experimental method using 248nm KrF excimer laser for the micro-spheres perturbation target was presented. Some machining experiments were carried out with this method.Finally, the experimental datum and HGM examples were analyzed. The result showed that the method of excimer laser machining micro-spheres perturbation target can achieve better performance and meets scheduled technical need.