Characteristics Of Excimer Laser Micromachining During Mask Projection Etching And Pattern Scanning Etching

Some characteristics of excimer laser micromachining during mask projection micromachining and pattern scanning micromachining are described in this paper. The thesis comprises three parts. (1) The basic principle of the excimer laser process and their application are described. Two different laser-material interaction are demonstrated from the experiment with Cu,stainless steel and PMMA. Characteristics of HAZ(heat affected zone) are observed during mask projection micromachining and pattern cacnning micromachining. (2) Laser microdrilling of high-aspect-ratio holes has been studied by using mask projection. Changes in the hole morphology,the heat affected zone,the entrance diameter,the maximal depth were found in relation to the laser parameters applied. Some characteristics-curves are obtained by the analysis of experimental data. (3) The micromachining characteristics of the pattern scanning micromachining have been studied. The relation between scanning parameters and the surface quality of the microstructure such as minimum line width is presented. It was found possible to machine structures with lesser line width and feat affected zone by optimizing the parameters such as the canning rate and repeatability during the laser patter scanning micromachining. At last, some microstructures such as micro-combs which have good surface quality are obtained by electroplating using the pattern fabricated from the PMMA. In the end, the theory of excimer laser micromachining and the essential nature of such technology are given. All of this make possible to further improvement of excimer laser micromachining.