Optical Properties Of AZO/PET Flexible Film Grown By RF Magnetron Sputtering

In this article, we have successfully prepared Al-doped ZnO films (ZnO:Al/AZO film)on flexible PET substrate by RF reactive magnetron sputtering. Then after analyzing and testing the structural and optical properties of the AZO flexible film grown under different sputtering conditions, and the study of growing process and the light-emitting mechanism, we have improved sputtering conditions, and got the AZO flexible film with stimulated emission near UV performance at the end.We have prepared AZO flexible film with different structure and properties by controlling parameter method, such as changing sputtering power, substrate temperature, argon, oxygen flow ratio, deposition time and other parameters. We also simulate the film growth process by using Monte Carlo simulation to guide the optimization of the process conditions.In this article, we have analyzed the surface component, surface structure, and the crystal structure of AZO flexible film under different conditions by testing X-Ray Energy Dispersive Spectroscopy (EDS), Atomic Force Microscope (AFM) as well as X-Ray Diffraction (XRD) to study the law how the sputtering conditions affect the structures. The UV-Visible Absorption Spectrum (UV-VIS) and Photoluminescence Emission Spectrum (PL) test results of the AZO flexible film under different conditions show that the AZO/PET flexible film grown by radio frequency reactive magnetron sputtering technology under the appropriate preparation conditions we selected show excellent visible light transmittance and the strong ultraviolet absorbency as well as excellent photoluminescence properties near390nm. Finally, we analyzed the light-emitting mechanism of AZO/PET flexible film to work out the optical characteristics of the excitonic emission near band-edge. The results of all this study provide an experimental basis and theoretical guidance for the development of AZO flexible film optoelectronic devices.