| Zinc oxide (ZnO) films were deposited on flexible polyethylene terephthalate (PET) substrates by intermediate frequency reaction magnetron sputtering method at room temperature. We have prepared ZnO flexible film with different structure and properties by controlling parameter method, such as changing sputtering power, argon and oxygen flow ratio, and deposition time. In this article, we have analyzed the and electrical properties, crystal structure, surface structure, optical properties and the surface component of ZnO flexible films by Hall tester, X-Ray Diffraction (XRD), Atomic Force Microscope (AFM), Absorption and Transmission Spectrum as well as X-Ray Energy Dispersive Spectroscopy (EDS), respectively. The optimum sputtering power and Ar/O2 ratio was 20w and 1:1.Laser irradiation was found to be more effective and original both for the modification of the surface morphology and crystal structure and for the improvement of the electrical properties of the as-grown flexible ZnO thin films. The result showed that the as-grown films had a relative smooth and dense surface morphology and an amorphous structure. The irradiation treatment improves the crystalline quality of the flexible ZnO thin films through promoting the aggregation of the ZnO grains and enhancing the (100) and (101) orientation.A significant increase in the carrier concentration and a decrease in the resistivity of the films were observed after laser irradiation. The results of all this study provide an experimental basis and theoretical guidance for the development of ZnO flexible film. |
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