| This paper researchs the design and realization of the 2nd generation MOCVD monitor control system, which comes from the military-type electronic components projects(0405XE0004):Wide bandgap semiconductor material growth technology and the development of MOCVD equipment.Siemens PLC-300 is the core controller of this system, and the PC interface monitor control system is realized by WinCC with the C language and Visual Basic, serial port technology is used for computer to communicate with system outsides instruments.On the basis of studying MOCVD technics, the system using WinCC design a intuitionistic, visual, and easy-to-use PC monitor control system. In view of the deficiencies and weaknesses in the first generation, a new design concept is put forward. For examples, adding real-time data for the analog and digital preservation, temperature control curve simulation and preservation of the real-time data, analog output smoothing, alarm processing and other functions.Some problems such as using up PLC memory, slow speed of communications and screen update delays caused by multi-variables transmission are discussed and solved. A new method of batch modification and data-saving is accomplished in the second MOCVD system.This MOCVD system not only inherits the advantages of the first one, improving some function of the control system is also increased. The performance of the system is improved, more stable, and more of artificial intelligence. The system has now entered the stage of formal operation, and have also grown three GaN films of high quality at the same time. |
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