Reparation And Research Properties Of MgZnO Film By PLD Preparation And Research Of Si-based Optical Microdisk Resonator

The paper consists of two parts. One is using Pusled Laser Deposition (PLD) method to prepare MgZnO films, and analyze its crystallization,optical properties. We accomplish the preparation of UV detector. The other is finishing the preparation of Si-based microdisk reaonator by micro-nano technology.ZnO is a direct wide band gap semiconductor material with Wurtzite crystal structure. Band gap is 3.37eV at room temperature, and exciton binding energy is 60meV. Recently, ZnO and ZnO alloys become a hot research. Compared to AlGaN alloy films, MgZnO crystal alloy is a new photoelectric material. It has lots of advantages, including simple preparation, non-toxic, abundant raw materials, adjustable wide band gap (3.37-7.8eV), so it can cover the entire UV region, which becomes the preferred material of various optoelectronic devices, particularly UV detector. By adjusting the process conditions of PLD, we have prepared (220) oriented MgZnO film with high–quality, high Mg-doping content, band gap up to 5.46eV, and absorption edge is located at completely solar-blind region. For the first time, we observe the changes of (220) oriented crystallization depending on annealing temperature.We take advantage of micro-nano technology to finish prototype devices-UV detector on MgZnO films, which has a small optoelectronic current.Along with the development of micro-nano fabrication techniques, it is possible to prepare all kinds of new optical resonators with natural and synthetic materials. With hih Q value optical microdisk resonator has much application in many fields,such as high integrated optical path with low cost, biological sensors with high sensitivity. Microdisk resonator is the most promising method to research cavity electrodynamics and quantum information. We successfully prepare the microdisk resonator with WG mode."Mushrooms" microdisk resonator is mainly finished by through the photolithography, dry and wet etching technology. The process of production is relatively simple, low cost, high quality factor-Q, et al. We realize the controllability and repeatability of microdisk resonator, which lay a foundation to research cavity electrodynamics and quantum information.In summary, firstly, we have successfully prepared high-quality, high-Mg content MgZnO doped films, and for the first time we observed (220) crystallization depending on the annealing temperature. And we use micro-nano fabrication tofinish the preparation of UV detector device. Secondly, we have complete the preparation of Si-based microdisk resonator with high-performance and mushroom-like structure.