Research On MgZnO Solid Mounted FBAR

Mobile devices continue to move towards the size of small size,functional diversity,RF power continues to improve direction.Micro-mass sensors also require smaller size,continuous integration of functions,sensitivity continues to increase,increasing accuracy.The thin film bulk acoustic resonator(FBAR)has the characteristics of high resonant frequency,small volume,good mechanical performance,easy integration with IC process,and is being paid more and more attention and attention.Based on the above factors,a solid-assembled thin-film bulk acoustic resonator(SMR-FBAR)was fabricated and studied in the following.Based on the characteristics and requirements of FBAR,combined with the simulation results,the structural design of FBAR is carried out.The material properties,crystal structure,acoustic impedance matching and material function were investigated.The material design of SMR-FBAR was carried out.MgZnO was selected as the piezoelectric material.The SMR-FBAR was prepared and the growth conditions of the piezoelectric layer under different carrier gas,gas flow rate and substrate temperature were compared,and the optimal growth condition of C-axis orientation was obtained.High-performance SMR-FBAR with resonant frequency of 2.56 GHz,electromechanical coupling coefficient of 3.96%,QS = 812,Qp = 695 was prepared by RF magnetron sputtering and MEMS technology,and the complete process was mastered.The sensing principle and structural characteristics of FBAR as a high-sensitivity mass sensor and biosensor are investigated.The FBAR biosensor is designed and fabricated as a micro-channel.Through the research of this subject,the experience in high frequency FBAR process technology and biosensor theory and application model is summarized,and a breakthrough has been made.Which will lay a good foundation for the research and application of nano-scale integrated RF filters and high-sensitivity networking sensors.