Design And Implementation Of Power Amplifier Control Board Of Photolithography Motion Platform

IC key equipment and ultra-precise manufacturing technology directly reflect the level of a country's manufacturing technology and capacity. Lithography process plays a dominant role in the development of the chip industry. The motion control system is the essential element of the implementing of lithography machine prototype. So the design and implementation of a complex motion control system is the key technique.Firstly,this article analyzes the physical location in the entire complex motion control system of the power amplifier control board (PAC).After the analysis of the functional requirements and the practical work process whole system on the board, the overall hardware and software solutions of the control circuit are designed and fulfilled.This board is based on the highly integrated FPGA microcontroller which has plenty of functions and advantages on chip,such as high speed, high flexibility, high reliability and ease of development and so on. The high precision 16-bits digital to analog converters(DAC) are used for receiving digital instructions from the upper board, which control the servo drives through converting.The 16-bits analog to digital converter(ADC) is used for acquiring the real-time datas from the DA,which is in order to achieve the overall calibration. To guarantee the required accuracy of the AD and DA, the calibrated results showed that both meet the design requirements.The ethernet transeiver chip is used for the Serializer/Deserializer transform. Optical fiber is used for the transmission channel and Optical to Electrical converters are improving the high data transmission rates, reducing the electromagnetic interference.One protocol is designed and implemented for high-speed serial link communication protocol (HSSL). The results show that the data based on this protocol and can accurately transmit the transmission by board-level debugging . The differential receivers are used to convert the differential signals to single-ended signals,which are used for calculating the location information in FPGA. The high-speed optocouplers for digital isolation is used to achieve electrical isolation between the boards and reduce the mutual interference.The usage of top-down modular design formula can implement the logic function in FPGA.The test and debugging on the real board proves that the power amplifier control boards work steadily, have high-precision, coordinated operation .These are all meet the requirement of workflow.