Design And Realization Of Controllable Measuring Force Profilometer

With the rapid development of manufacture technologies, the synthetic measurement of profile with tiny measurement force, large range and high precision has become more and more imminent. Owing to the discrepancy between measurement force and measurement speed, it is of great significance to develop a profile measurement sensor with controllable measurement force.In this paper the force of traditional profiler is analyzed, the complex relationship between measurement force and lever system is derived, a solution which is improved the structure of the lever is proposed. The mechanical relations between the measuring rod and the surface are simplified by the structural change of measuring rod and a gravity center adjustment device. A voice coil motor (VCM) is added into the measuring system to control the measuring force. By adjusting the current in the coil of the VCM in real time, the measuring force can be controlled. Designed A simple method of parameter determination and the method for determining the zero position sensor is designed.The requirements of peripheral circuits is analyzed and the basis of the laboratory is considered, the motion control card is developed by the chip PCI9052. The development process of the motion control card, the motion control card hardware, E2PROM board configuration and debugging process are introduced. Development process and development considerations of using of Windriver to write driver of the motion control card are detailed introduced.The importance of measurement error compensation is discussed, measurement error model is established, the polynomial fitting method is chosen to compensate the measurement error. A method of calculating the polynomial coefficient which use a standard ball is described.The voice coil motor control parameters and the nonlinear errorcompensation parameters are got by experiments, the feasibility of adjusting the measurement force by adjusting the coil current and the effect of non-linear error compensation are validated by experiments.