Excitation Power Supply Design Study, Based On The Principle Of The Piezoelectric Generator Fuze Mems Airflow

With the progress of science and the development of MEMS technology, the mini-aturization and intelligence of fuze has attracted more and more people's attention and favour, and the realization form of fuze's function is moving from the traditionally mechanism to the direction of electronic, intelligent and miniaturization. However, the power supply for fuze is so large that it greatly enlarges the volume of the fuze. As an integral part of the whole system, miniaturized power is the key to determine that whether the system can work independently. So, a power supply with small size, good performance, high stability, not only can solve the problem of fuze circuits self energy supply, but also can solve the problems of some projectiles missing redundant power environment. Due to the traditional power supply has too many problems of large volume, long activation time and unstable performance, to meet the requirements. So it has a great economic value and military significance to design a new small power supply.Firstly, combined with the background of the subject, the paper described the development of MEMS technology, the needs of small physical power for fuze, then investigated the status of small physical power, and it's development. At the same time, the properties of piezoelectric material and the principle of air jet generator were also introduced. Then a small air jet generating device was designed based on the conditions of fuze's tactical and technical requiremnts for power designs, MEMS technology and power generation characteristics of piezoelectric materials. Its performance analysis and simulation results show that the micro-jet generating device has feasible to some extent. Finally, introduced the jet processing technology for MEMS devices and designed an energy acquisition circuit, then experiments were carried out on the characteristics of the airflow drive power and the acquisition circuit. It was found that the experiments results are basically consistent with the theoretical analysis; both of them can meet the requirements of the fuze.Finally, the work of this dissertation was concluded. The innovations and contributions of this work were introduced. And also, the potential issues of this research were pointed out.