The Research On Cyclic Radial Shearing Interferometer

Wavefront shearing interferometer is the interference which happen between the under test wavefront. It is the use of devices which can split the under test wavefront into two identical or similar wavefront, and he two wavefront is spatial coherence. They produce spatial displacement, and interference in the overlap zone. And compared with the traditional interferometer, such as Twyman-Green interferometer, the shearing interferometer not only high has sensitivity and high precision and non-contact, but also has unique advantages. Shearing interferometer is aplanatic interference, so it isn't special requirements on the source. And the white light interference pattern can be cut. Because of the reference light and object light are common path, the shearing interferometer is to temperature and air and vibration insensitive. Most of the Shearing interferometer can measure lots of aperture lens. And the radial Shearing interferometer can get information from the single interferogram. Therefore, study on the radial shearing interferometer has important practical significance. The main research work as follows:The radial shearing interferometer has many advantages, which compared with the traditional interferometer. We known the development status about radial shearing interferometer at home or abroad, and the basic shear mode for shear interferometer was listed on. This section describes the optical principle of radial shearing interferometer, and the classification of radial shearing interferometer.This section analyzes the sensitivity of the relationship between the shear ratio and sensitivity, analysis of the relationship between the telescope and the Shear ratio. In this part, A six times zoom telescope was designed. And on this basis, the shear ratio about the radial shearing interferometer was chosen.Respectively, every part of the cyclic radial shearing interferometer was designed in this section. Including mirrors, beam splitter, the laser beam expander telescope, telescope, compressed beam telescope. This part of the article to draw a mechanical assembly drawing of cyclic radial shearing interferometer.Cyclic radial shearing interferometer measurement system was simulated in the non-sequence space of ZEMAX. Telescope system is very important for cyclic radial shearing interferometer. So, This section analysis of the impact of telescope system for cyclic radial shearing interferometer. And it shows the adjustment of three optical methods of shearing interferometer. After completion of this work, The cyclic radial shearing interferometer system has been set up. Interferogram was taken by using CCD camera in the cyclic radial shearing interferometer.