The Surface Structures Of The Magnetoelectric Effect And The Very Small Resistance Of The Signal Read

As the micromation tendency in Integrated Circuit and Micro Electro Mechanical Systems become more and more clear, the limitations of silicon in application are gradually embodied, such as in high temperature, high frequency fields, and people begin to pay attention to new substitute material. Graphite possesses excellent electrical, magnetic, mechanical and thermal characteristics and has great potential in many areas especially in Integrated Circuit and Micro Electro Mechanical Systems. And it has been taken seriously by the industrial and scientific community of the Silicon Valley in the United States. In this dissertation, the electronic structure of graphite and its numerous superior properties are briefly summarized and the potential applications of graphite in magnetic actuators and electronic compass in MEMS are analyzed. According to magneto-resistive effect theory, on the basis of analyzing kinds of preparation technology of graphite in MEMS, this dissertation develops a mechanical cleaving process to get the graphite sample, brings forward a graphitic scheme which is similar to silicon wafer, designs a specific MEMS oriented graphitic Cross microstructure. With high-resolution microscope and four-point probe resistance measurement technology, a suitable sample is elected in order to etch the microstructure of graphite. In this dissertation, corresponding circuit test system is designed, under which the relation between the graphitic MEMS microstructure, current, voltage and vacuum as well as the influence of magnetic field on output voltage are studied. This dissertation researches the conductivity of graphite microstructure under different vacuum levels as well as its properties under other extreme conditions. The balance state of the MEMS microstructure of graphite and the control of magnetic field on the output voltage of graphitic microstructure are achieved through experiments. And the quantum Hall effect is observed. Some exploratory work about miniaturization application of graphite has been done in this dissertation. In addition, aimed at measuring the small resistance of graphite, an adjustable micro-voltage detection device is designed. And the experimental data demonstrates the feasibility of this circuit. At last, this paper puts forward some improving proposals.