.13.56 Mhz, On-chip Antenna Design And Production

As the development of the VLSI technology, computer technology, as well as the information security technology, IC card technology matures. Now, Non-contact IC card, because of its ease of use, no mechanical contact wear, stable, reliable, low maintenance costs and other advantages in many areas, has begun to replace the contact-less IC card.The antenna in Non-contact IC card is used to obtain the necessary work power for IC card and exchange data with the card reader, through electromagnetic coupling. IC cards in the current market, are all with the antennas out of chip. They have several advantages, such as having high-Q antenna, easy to manufacture, having modest cost; but their larger area, easy to break, make them not qualified for tasks like the security task or buried into the animal in the form of eco-labeling. If the antenna can be make on the chip, this will make the IC card smaller and more convenient to use. The increased production of on-chip antenna is expected to reduce costs and expand in areas such as commodity security applications. Based on this objective, the thesis designed the 13. 56 MHz on-chip antenna. For the HF (13. 56 MHz) band, the system works in the near-field of the antenna, the chip get the energy through electromagnetic coupling from the reader coil's near-field radiation. At present, the realization of the on-chip antenna is still mainly as integrated inductors on silicon.First of all, the thesis compared the tow circuit model of the integrated inductors on silicon: the sub-model and the equivalent lumped circuit model, and selected the lumped model as a model of on-chip antenna. Then thesis simplified the Lumped model, and compared the antenna's operating characteristics as resonant and non-resonant. After analyzing the loss of on-chip antenna and the inhibition of loss, thesis proposed three ways to improve the Q value.Secondly, the thesis presents the basic design flow of on-chip antenna. Based on chip designed by the IC Design Co., Ltd., the thesis designed 13.56 MHz on-chip antenna. The diameter of on-chip antenna has been limited by the chip area, so based on the outside diameter, through theoretical calculation, the thesis analyzed performance of the antenna with different parameters, such as different number of coils, different width, different line spacing, different oxide thickness, etc.. Performance of on-chip antenna under 17 different process conditions (that is, different metal thickness and oxide thickness) are compared; and eventually thesis identified 182 different antenna structures.Third, In order to reduce the design cycle, the thesis designed and placed 182 different antenna structures in the territory of Mask. In order to optimize the modeling of on-chip antenna structure, at the same time the thesis designed of a chip of inductor, including 182 inductors corresponding the on-chip antenna. The on-chip antenna is manufactured by a special copper process, which is more difficult than the traditional aluminum process and conventional copper process, so the thesis also describes the preparation and realization of on-chip antenna and on-chip inductor.Finally, the thesis described the test and parameter extraction methods of inductor; and also introduced the test methods of on-chip antenna.