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Optimization Method Of Alternately Shift The Phase Mask Technique Territory

Posted on:2009-08-30Degree:MasterType:Thesis
Country:ChinaCandidate:H P HuangFull Text:PDF
GTID:2208360272960189Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
With the development of integrated circuits(IC),the feature size keeps scaling down and is measured by nanometer today.IC design and manufacturing are not independent any more,therefore a lot of design for manufacturability(DFM) issues are caused.Alternating aperture phase shift mask(AAPSM) is an advanced technology to enhance lithography resolution by adding phase shifters to the mask, which corrects the pattern distortion caused by diffraction of light in deep sub-wavelength lithography.Layout optimization of AAPSM,which belongs to the field of DFM,is the computer-aided design method of AAPSM.We develop an automated tool for AAPSM layout optimization called FDPSM (Fudan Phase Shift Mask),which performs phase conflict detection and phase assignment of dark filed AAPSM.Related data structure and algorithms are presented in this paper.An algorithm of phase assignment based on decomposition of tri-connected components called TCDBPA is proposed.Due to the huge data volume of layout, traditional algorithms cannot solve phase assignment problem on chip level.TCDBPA imposes divide-and-conquer technique.It first decomposes the phase conflict graph into its tri-connected components,and then solve phase assignment problem on each component and merge all solutions in the end.Because the size of input is efficiently decreased,it speeds up the runtime and can be applied to chip-level phase assignment.A fast dynamic priority search tree(DPST) is also presented.In phase conflict detection,DPST is used to query the phase conflicts between different features. Compared to traditional DPST,our DPST is more applicable when the data volume is large,insertion and deletion are performed frequently,and the size of query is small. It's especially designed for the use of IC physical design.
Keywords/Search Tags:alternating aperture phase shift mask, phase assignment, tri-connected components, phase conflict detection, dynamic priority search tree
PDF Full Text Request
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