Compact Two-dimensional High-precision Piezoelectric Scanning System And Spatial Displacement Error Analysis

In modern novel industry and scientific research area, the micro displacement system with high precision and resolution plays a significant role. The paper profoundly explores the domestic and international research status of micro displacement system. It also analyzes the application and features of the common piezoelectric scanning system. It chooses and analyzes a compact L-shape two-dimensional piezoelectric scanner which can be widely used in the precision detection. The possible movement coupling error is analyzed and a proper framework is adopted to eliminate or decrease this error.Through a Twyman-Green System which can conduct online detection to the two-dimensional scanner, a mathematical model is established to describe the space micro displacement of piezoelectric scanner. Towards two types of piezoelectric stack: side-soldering electrode techniques and copper sheet electrode techniques, the error of space micro displacement is analyzed. Through large amount of image processing, it is discovered that piezoelectric stack using side-soldering electrode techniques brings in big space deflextion, which greatly affects the precision of two dimensional scan. On the other hand, piezoelectric stack using copper sheet electrode techniques brings in little space deflextion. It is also showed that the point-contact measurements can be only used to measure the single point and unable to detect the space deflextion.The nonlinear effects of piezoelectric stack and its impact to the two dimensional scanning are analyzed. The scanning results with nonlinear effects are simulated. And the software is established to calibrate the nonlinear effects with open loop. The control program is simple and enable the piezoelectric stack react quickly.A power supply is designed and implemented to drive the two dimensional piezoelectric scanner. Using the high voltage operational chip PA241, it can output a direct current voltage with the range of 0 to 200V. The power supply has good linearity and the designed resolution is up to 50mV.The application of scanner to the atomic force microscope (AFM) is successful. By the detection of aluminum oxide sample, the particle's boundary can be observed. And the results of same area in different time shows that the two dimensional has good repeatability...