Silver Low-e Film (low-e Film)

Since 1970s, the world energy crisis has been more and more serious. People increasingly realize the importance of energy conservation. Energy conservation as a national strategy has aroused high attention in every country. Thus, the scientific work that discussion on the various energy-saving methods and energy-saving products has entered a new period. In recent years, optical properties and structure of the Low-E film is gradually become a new research hotspot.In this paper, the relation of Low-E film's optical characterization and microcosmic structure has been discussed primarily, and methods to improve them have been also brought forward in this paper. Combining of DC and RF magnetron sputtering method, the Low-E film with excellent performance has been prepared in the research, which has a certain model significance to continuous production in industry.The main work and innovations are as follows:First, using highest visible light transmittance T_max and the width of the wavelength W₇₀, when higher than 70% transmission rate, as a judgment of the Low-E film's quality standards. Preparation of a structure of TiO₂ (25nm) /Ag (10nm) /Ti (2s) /TiO₂ (25nm) compound Low-E film, T_max to 84%, W₇₀ to 240nm, which surpasses in the present industrial Low-E film indicators.Second, using AFM to observate the Nano-Ag film microstructure, Explained the mechanism that how two seconds sputtering time's barrier layer Ti film protect the nano-Ag film not to be oxidized.Third, observate the influence of compound Low-E film's optical property by thermal annealing, the result shows that High-temperature thermal annealing can effectively eliminate unsaturated bonds(Si-O,Ti-O etc.) in the Low-E surface layers, increases the width of the wavelength W₇₀, when higher than 70% transmission rate, and improve the Low-E film optical characteristics.Fourth, observate the Low-E film's endurance of the water immersion corrosion. The result show that the water immersion corrosion can make serious damage to the Low-E film's morphology and optical properties, Proposed three kinds of solutions: 1, Increase the sputtering time to increase the thickness of the surface; 2, Takes the protective measures to the edge of the Low-E film; 3, Change the material of the surface dielectric layer.