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Wireless Multi-sensor Networks, Infrared Pyroelectric Power Sensor Miniaturization Of Design And Research

Posted on:2007-03-25Degree:MasterType:Thesis
Country:ChinaCandidate:H ShuFull Text:PDF
GTID:2208360185491452Subject:Optical Engineering
Abstract/Summary:PDF Full Text Request
The purpose of this article is to achieve microminiaturization of the infrared TSD sensor for carrying out the Wireless Sensor Networks. It designs the circuit board for infrared TSD sensor using practical realizable technology, and advances conceive of the entireness modular miniaturization design of the infrared TSD sensor using micro electromechanical system(MEMS) manufacture technology.On the basis of background of the research project, the article particularly analyzes the characteristic of the signal of infrared radiation detailed, and introduce two theory models of the infrared detector. The article also recommend the different infrared detectors using different photoelectric effects and their performance parameter, and indicate the relative merits of these different infrared detector. On demand of the application environmental , the infrared TSD sensor is selected as the infrared detection part of wireless multi-sensor network.After analyzing the principle of the infrared TSD sensor, this article divides the infrared TSD sensor to three parts and does the miniaturization of the three parts, then integrates the three parts on the silicon board. Owing to the restriction of technologic, this article primary dose the part of circuit integration design, then integrate the all parts on the silicon.At last, this article proceed research and design of the whole infrared TSD sensor using MEMS technologic. And the article prognosticate the size of the infrared TSD sensor according to the practice level of MEMS technologic.
Keywords/Search Tags:wireless multi-sensor network, infrared TSD sensor, TSD effect, microsystem, MEMS, LIGA technologic, surface micro-fabrication, micro-fabrication on silicon body
PDF Full Text Request
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