The New Multi-functional Integrated Optics Devices (mioc),

The study object of integrated optics is the theory, technology and application of plan optical device and system. The basic theory of the integrated optics is waveguid optics, the technical basic is thin film technology and microelectronics.With the development of the second and third generations fiber optics gyroscopes, it promotes greatly the development and application of the multifunction integrated optical circuit device(MIOC). Because LiNbO₃ material have the characteristics such as good electro-optic, short electro-optic time response and high transnissivity, it is suitable substrate material used as manufacturing low loss waveguid device and has broad application prospects .In this thesis, the research work of a new type multifunction integrated optical circuit device(MIOC) used in singal processing of IFOG is described through parameter theoretical design and technological process. Its working wavelength is 1.3μm. It is composed of thirteen functin–components including two 3-dB Y- junction power splitter, two directional couplers, two waveguide attenuators and one polarizer of waveguide itself. The prominent feature of the device is that it has a beat detection function with respect to the single Y-branch MIOC device, and it plays an important role in improving the inertial-grade and the high precision steady-aim system because of the beat detection function. Farthermore it has direct influence on the improvement of the high flexibility, shockproof and overload-resistance for the steady-aim system. The developing successfully of the device put forward a new train of thought for the developing in depth of MIOC.The device is a synthetical applicating example of phase modulator, intensity modulator and directional coupler theory. The characters and fabricating process of LiNbO₃ optical waveguide, electrodes design principle, the influence of SiO₂ dielectric buffer layer on the performance of the device and design principle of tapped power(ratio ) are analyzed. In order to realize low half-wave voltage, high polarzation extinction ratio, low pigtailing polarization crosstalk, low insert loss, precise tapped power (ratio) and good splitting beam ratio, the optimum design was performed. Some critical technologies were described including the annealing proton-exchange (APE)...