Optical High-precision Micro-accelerometers The Displacement Measurement System

High precision MEMS-based micro accelerometer is an important part of Inertia Guidance System. So far, the general precision of MEMS-based micro accelerometer is still remained under 10~-4 g. The purpose of this research is to fill the blank of technology in this area, and raise the general level of Inertia Guidance of China. In this thesis, we introduced the principle of micro accelerometer, in company with the theory of its design and error analysis. We discussed the main performance of the system as well as its testing method. Base on it, the key component of micro accelerometer - the design of micro displacement measurement, was presented and realized.During the design of this measuring system of micro displacement, a novel design principle - optical lever, is proposed, which becomes the foundation of the entire measuring system. The stability, reproducibility and high measurement precision (4nm) is proved by repetitive testing experiments. By theoretical analysis, it satisfactorily meets the requirement (10~-6 g) of measuring precision of microaccelerometer.