Micro-optical Adaptive Systems Based On Pzt Thin Film Micro-mirror Cell Technology Research

Micro optics adaptive unit technique is a kind of intelligent MOEMS technique, which can adjust wave front aberration and get clear image. Micro optics adaptive system based on this unit technique has advantages that conventional adaptive systems don't have, and it has broad prospect in many fields in the future.Micro-mirror is a fundamental part of micro optics adaptive system. In the paper, the development and application of micro optics adaptive system are represented, and the present research condition and prospect are described. The technology of fabrication and characteristic of some reflecting mirror are compared. Through experiments, a program of fabricating micro-mirror based on PZT thin film in micro optics is established.According to converse piezoelectric effect, the thickness of the fabricated PZT thin film varies when the applied voltage changes, making adjustment in the small part of the micro-mirror surface. As a result, the wave-front adjustment by phase control is realized.PZT film is fabricated by sol-gel method using the following chemical materials:(C₄H₉O)₄Ti ,Pb(CH₃COO)₂·3H₂O and Zr(OCH(CH₃)₂)₄.(CH₃)₂CHOH. After spincoating and RTA method, a thin film is obtained, and then repeating the step above again and again, the needed thickness of the films is achieved.Micro-mirror based on PZT thin films has following advantages such as little capacity , high accuracy and quick response. This kind of mirror can meet the micro optics adaptive system's miniaturized and real-time demands in many fields.