.320 ¡Á 240 Uncooled Infrared Focal Plane Array Readout Circuit Research And Design

The project was to research and design a 320×240 ROIC for uncooled Infrared Focal Plane Arrays (IRFPA), it was a sub-project of the National 973 Project (research of the ferroelectric UFPA detector ROIC). The main works of the project contained three parts: one was to design a 320×240 ROIC fit for monolithic uncooled IRFPA; two was to design the layout of ROIC; three was to design the process flow of ROIC, to solve the un-compatible of high anneal temperature of ferroelectric and standard CMOS process. In the aspect of ROIC design, the theories of all kinds of infrared detectors were analyzed in detail, especially the pyroelectric detector, and through the comparison of all types of ROIC, a low-noise and high performance ROIC had been designed and it contained such modules: pre-source follower, amplifier, low pass filter, sample and hold stage, crosstalk buffer, output power stage and digital control circuits. In the aspect of ROIC layout design, 0.6um single polysilicon, double metals process and full custom layout design method were used. At last, through accuracy design of every layout and interconnection, the whole layout area was 17×15mm2, almost reached the photography limitation of 6 inches process. Because there were 280,000 MOSFETs in the mix-signal integrated circuits, there were more difficulties to design it. In the aspect of ROIC process research and design, the main work was to use refractory metal to solve the un-compatible of high anneal temperature of ferroelectric and standard CMOS process. In the 16×16 test ROIC, Pt metallization with lift-off process was used and the high temperature test had already passed. In the 320×240 ROIC,because of the limitation of lift-off process and large arrays, a novel Ti and its silicides metallization process had passed the single process test instead of Pt. And now the layout for the special process had been completed, the data of GDS2 had been exported, and the masks had been completed, ROIC had already in tape out process. The achievement of the project is that the monolithic pyroelectric IRFPA...