Piezoelectric Micro-displacement Structure Design And Simulation Of The Drive

The piezoelectric micro-displacement actuator has widely applied prospect in many areas, such as precision orientation, micro manipulation, and so on. Compared with other kinds of actuator, it has many advantages, for instance, tiny bulk, unlimited resolution, rapid response, no heat, low power consumption, no magnetic fields. So the research of piezoelectric micro-displacement actuator has got much attention in domestic and abroad. Making a kind of piezoelectric micro-displacement actuator which has large motion distance and high resolution is the research goal of this discourse. The research contents of this discourse mainly include the following six aspects:1,This discourse discussed and studied the performance of mechanics and electricity about piezoelectric crystal. The principle about piezoelectric actuator is expatiated basing on the study of piezoelectric effect;2,The electromechanical coupling finite element formulation of piezoelectric element is deduced in this discourse on basis of finite element theories and piezoelectric effect;3,Simulation analysis for the physical parameter of piezoelectric driving element under various electric fields and boundary conditions is conducted with ANSYS, it includes the distortion and the output force of element,and so on;4,Basing on analysing the structure of piezoelectric actuator,the structure of bionic and stepping piezoelectric micro-displacement actuator which can meet the technical request is designed;5,Simulation analysis for actuator is conducted and the structure of actuator is optimized;6,Basing on simulation analysing piezoelectric actuator, a piezoelectric actuator is made. The experiment about this actuator has been done. The rationality of design and simulation analysis is verified on basis of on comparing the results of experiment and results of analysis.The results of experiment and results of analysis indicate the structure that this discourse designed can meet the request of large motion distance and high resolution. Some useful datum and conclusions are obtained. These datum and conclusions would be helpful to the research in the future.