Micro-bolometer Non-uniformity Of Testing And Calibration Technology Research

Infrared technique is used widely in both military field and civilian field as means of finding, detecting and identificating the targets. The development of infrared focal plane arrays technique promotes the performance of infrared system and makes photos immediately. The cooled infrared system is limited to use in the civilian field due to large size, high price. In the middle of 90' s great achievements were achieved in the manufacturing of uncooled microbolometer infrared focal plane arrays. By this technique infrared system can be made in the formation of small volume, light weight, low price and being portable. It promotes greatly the utilization of infrared system in all fields. So the techniques of uncooled microbolometer infrared imaging become one of the main points from now on.In the paper uncooled microbolometer infrared imaging system is studied from focal plane character, drive circuit and TEC s circuit of focal plane, and nonuniformity correction.The content of every chapter in this dissertation is summarized as following:In chapter 1, it is reviewed briefly the development of infrared detection technology, infrared imaging technology and nonuniformity correction of UFPA. On the base of domestic and foreign research situation, the problems existing in the research and producing of staring uncooled infrared imaging system in our country have been pointed out.At last, the research background of this dissertation is explained.In chapter 2, on the base of microbolometer' s working principle, the producing course of microbolometer focal plane is analysed, heat balance equation of the microbolometer is founded, the guidelines of focal plane are difined. At last, the performce of the 320X240 microbolometer chip is introduced.In chapter 3, the devolopment of microbolometer' s drive circuit is introduced in detail. Using the CPLD of Altera company, a small size sequence circuit is produced. Then the program is programmed by VHDL in order to perfect the program easily.In chapter 4, the devolopment of microbolometer' s TEC circuit is introduced in detail. At first , the principle of TEC is discussed. Then a new kind of TEC s circuit design for IRFPA is emphasized.In chapter 5, at first , the causes and charcters of the microbolometerfocal plane' s nonuniformity are discussed. Then some familiar nonuniformity correction methods of UFPA are compared, some important parameters of microbolometer focal plane are measured. The gain and offset of pixels is got. The principle of measurment, the test system and the method of measurment are intrduced. At last, an algorithm for NUC fitting for infrared imaging system is proposed.In chapter 6, the whole work of this dissertation is summarized and some problems remaining to be solved are pointed out.