| Capacitor sensor has a lot of advantages of simple structure, high sensitivity, excellent dynamic characteristic and strong resistance to high temperature, radiation and violent vibration, but with low-price. While there are also some disadvantages such as down-lead inconvenience, output signal disturbance, temperature drift and nonlinear influence, which limit it application. This thesis develops a new type of capacitor sensor with micro- mechanical process to simplify the down-lead encapsulation. It not only designs a signal conditioning circuit to measure and amplify the tiny variation of capacitance, but also accomplishes the temperature and non-linear compensation by software. |
