| In recent years the semiconductor industry to flourish, the rapid development of technology of semiconductor wafer foundry put forward higher request, how to improve the production efficiency of the issue to be placed before us. Automatic Material Handling System in a semiconductor manufacturing process will play a very important role, of course, AMHS application is not limited in the semiconductor wafer foundry, it applies to many fields, but the most in semiconductor wafer foundry. Why the Foundry most use the AMHS, is based on it can quickly and accurately move the Carrier to the destination, less in wafer idle time, reduce MO (miss operation), raise production efficiency.The company is a semiconductor wafer foundry enterprise, we use the AMHS system for semiconductor wafer foundry auxiliary production. I am mainly responsible for AMHS system management and maintenance, many years of experience in system analysis. This topic mainly through the study of current AMHS system in semiconductor wafer foundry applications, especially for clean room layout, the structure of AMHS, performance index and influencing factors analysis, according to the different problems combined with the actual work situations, we put forward the theory of improvement and the actual operation, the statistical the parameters of before and after, achieve improvement effect.The long-term signification of this topic is that hope of assisting in the production of AMHS manufacturers and AMHS user to obtain some enlightenment and optimize the design of the structure, When they facing the similar problems, they can find the solutions and solve them in a short time. According to the factors discussed under this topic, from the system design stage, through the stage of production to in the use of the client, they can take some preventive measures, which can make the AMHS system can play a greater role, improve the efficiency of the wafer factory. |
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