Oriented Defects In The Semiconductor Manufacturing Process Data Integration And Analysis

Basing on the defect data produced in semiconductor manufacturing manufacture process, this article provides study and discussion enterprises information integration. The information integration technology in enterprise application and engineering practice is researched and verified from requirement analysis, information abstracting, the data source integration, data mining, data modeling to data warehouse. Research of the theory of information integration technology also solves practical project applications. Information integration system can automatically collect raw data (.txt file) by defect inline scanner. After analysis, the original data is translated to a uniform standard file for user directly using and second developing. It helps user to analyze defect data to improve process technology and production yield. For system building, firstly it introduces defect's source and style and determine the criterion of information abstracting; Secondly it introduces the key algorithm, such as repeater, cluster, multi-layer overlay, and verify the result; Next it introducts how to building data warehouse which includes logic model, physical model and data dictionary designing basing on information extracted; Then it introducts how to establish whole system from environment configuration, system work flow, application integration and data cycle life.At last it proves the test and certification for the whole system for application performance, system performance and data accrucy, and it brings up the exploring problems.