Mems Process Map Of The Three-dimensional Reconstruction Technology

As a key technology of MEMS CAD, 3D Reconstruction from MEMS process and layout is a kernel module of process-level design and required to top-down design and bottom-up verification in the MEMS integrated design platform (MEMS GARDEN 3.0), which has important applied value.Firstly, MEMS fabrication technology was introduced, ant then some general process geometry model, such as base structure created, deposit, etching, photolithography and bond, was built. Then the identifiable process data model was got.Secondly, the system architecture was constructed, which inputted process flow file and CIF file and outputted solid model. Then the flow chart of the 3D reconstruction system was provided in detail, and the data structure and process algorithms were described.Finally, the utility of the system is demonstrated for micro-gyroscope. The solid model of micro-gyroscope met requirement completely, which is reconstructed by the system.In addition, the trend of development was discussed. Mask layout generation from solid model is very promise developed direction.