Phase-shifting Infrared Twyman Interferometer Research And Application

The dissertation is based on the item of scientific research-Infrared Phase-shifting Twyman Interferometer, which derives from Nanjing Research Institute of Astronomical Optics& Technology of Chinese Academy of Sciences. The Infrared Phase-shifting Twyman Interferometer being developed is to be used in measuring rough surfaces , large aperture spherical surfaces, and so on. It is required that the instrument be miniaturized , mobile and easily operated for the on line measurement in the optical workshops. The principles and key techniques of phase-shifting interferometry , the phase-shifting modulation of pyroelectric cameras and so on are analyzed in this dissertation. Also analyzed are the problems which possibly occur during the design , assembly and alignment, and the relevant resolution method is given. The co-alignment device of the C02 and LD lasers is designed, and co-alignment adjustment technique is brought forward in this dissertation. And the system of infrared primary alignment is also designed. Besides, the test and test result of some key components, eg. PEV and the infrared laser system, are introduced. Finally described is the special measurement, with Infrared Phase-shifting Twyman Interferometer, of a rough reflective surface and an aspherical surface.