Cxm100-2w Phase-shifting Fizeau Interferometer Instrument Key Technologies

The interferometric measurement is a high-precision method, widely used in the parameter of the optical material and organ measurement. In this paper, according to the development of the CXM100-2W phase shifting interferometer, we investigated some key technology of this interferometer, and we summarize the applications of the interferometer for measuring the optical value including an optical element, optical system, image evaluation and etc. In order to measure the refractive index inhomogeneity of the optical material, we describe five methods to measure the inhomogeneity of a window material, we used the four steps method and established its mathematical model, and a window material sample has been measured in our CXM100-2W interferometer. We obtained the accurate refractive index inhomogeneity without system error. At last, in order to resolve the question of the spherometer weared out at the laboratory long-term use, we proposed the method that use the interferometer to adjust the spherometer. By measuring the radius of the standard former which matches the spherometer in the ZYGO interferometer and the CXM100-2W interferometer, use its results to adjust the measure-ring's diameter. We discussed the error source of the spherometer measurements. Finally, we studied the technologies which was in combination with optic, mechanism, electronic, arithmetic of the phase-shifting digital interferometer, and finished its debugging of hardware and software by experimentation.