The Research Of Calibration And Testing Techniques Of φ 600mm Near-infrared Phase-shifting Fizeau Interferometer

The high power solid-state laser facility, acting as a driver of inertial confinement fusion(ICF), employs many optical components with high quality and large aperture, and has strict requirements for different spatial frequencies, which requires appropriate optical testing equipment with large aperture and technology. In this disertation, theΦ600mm near-infrared phase-shifting Fizeau interferometer are studied to solve the testing problems occurred in the manufacture of large aperture optical components for the domestic high power solid-state laser facility.First of all, lateral support techniques ofΦ600mm standard transmission flat and reflection flat are investigated using elasticity and finite element method. A double soft ladder support mode in 180°support angle is then designed. The wavefront variations of the interferometer cavity induced by the change of types of force and the axis positions of the ladder of the standard flats are analyzed, the data of which is used to adjust the peak to valley value of the interferometer cavity accuracy to 63 nm, which are in agreement with the results obtained in practical adjustment process.Secondly, a method of adjusting the common path interferometer with visible and near-infrared light is proposed for adjustment of the near-infrared light path. A scanning corner cube retro-reflector (CCR) method is also presented to test the emergent wavefront of the large interferometer. A 045mm CCR is used to test the wavefront of 0600mm interferometer along the horizontal diameter and guide the collimation alignment of the interferometer. The result shows that the PV value and RMS value of theΦ600mm collimated wavefront of the interferometer is 1.18λand 0.35λ, respectively. It is also found that the scanning CCR method has no strict requirement on the straightness of the slideway. The method to test the straightness of slideway based on PSD is presented, which ensures the accuracy of the scanning pentaprism method. The straightness of 500mm long slideway is tested. The maximum deviations of its yaw, pitch and roll angle are 3.22 arcmin,1.16 arcmin and 5.88 arcmin respectively. The errors of the method are analysed which shows that the accuracy of the test can be up to 0.2 arcsec.Thirdly, the algorithm to calculate the power spectral density and the method to test the system transfer function of large aperture interferometer is studied. AΦ100mm flat with 126nm height step is used to test the system transfer function of theΦ600mm near-infrared phase-shifting Fizeau interferometer by phase step comparison method. The result shows that the transfer function at the spatial frequency of 0.2 mm-1 is 64% which satisfies the requirement of mid-spatial frequency test. The effect factors of calibration of the interferometer system transfer function such as calibration error of step height, the relative tilt of the step and the noise filtering algorithm are studied.Finally, the performance parameters of the near-infrared large aperture phase-shifting Fizeau interferometer are tested with the PV value of its cavity accuracy of 63nm, the RMS value of its repetability of 0.3nm and the PV value of its stability of less than lnm. Using this interferometer, an oblique incidence absolute test method is used to measure the absolute vertical profiles of the 630mm aperture SiC mirror. The results show that the RMS value of the flat surface of the SiC mirror is 10nm.