Silicon Tungsten Oxide Films And Their Nature

The detection of the flammable, explosive, toxic or/and other dangerous gas are becoming more and more urgent, while the current commonly used gas-sening material has so many problems, such as bad indentify ability, poor self-repair capacity, complex preparation process, and so on. In view of the above questions, we proposed using magnetron sputtering combined with molecular template technolegy, by optimizing the preparation processs, combining chemical modification in situ, vacuum annealing, lithography, etc, to prepare the tungsten oxide semiconductor nano-porous films with three-dimensional structure, high pecific structural stability with different chemical dosage ration of Cu-doped or In-doped. Such material has a strong gas-sensing properties of a variety of harmful gases, such as: NO_x, SO_x at a wide concentration range.According to the gas adsorption-desorption theory, because different gases will have different donor or acceptor surface state at the surface of tungsten oxide gas-sensing materials'band structure, we proposed using C-V, C-F and I-V methods to study the gas-sensing properties, thus to identify and demarcate the different ppm concentrations scope of harmful gases.Tungsten oxide is typical gas-sensing material of semiconductor oxide. Its gas-sensing property is very exceptional.The paper focused on the electrical and optical characteristics of WO₃ thin film to make a beneficial exploration to develop the gas sensor. This article have reviewed the research history, research significance, preparation method and various analysis and detection methods, and then stated our research on the basis of former research results. We prepared five series WO₃ thin films, and made measurement and analysis through Raman, and so on.