Dc Glow Discharge In Three-dimensional Pic / Mcc Simulation

With the development of the micro-electronic fabrication, the technology of the direct current glow discharge is applied in much fields.A theoretical and computational model has been present to study the ionization of the direct current glow discharge using a three-dimensional particle-in -cell plus Monte Carlo collision method. The major achievements are listed as the following:(1)Particle, fluid, and hybrid models are focused on the theoretical and computer simulation of the direct current glow discharge and direct current glow discharge plasma. In this paper, these three models are reviewed, summarized, and contrasted respectively. The future research and development is viewed .It is important to study the ionization of the direct current glow discharge. And the particle-in-cell plus Monte Carlo collision method in particle model is preponderant in the simulation of the direct current glow discharge and direct current glow discharge plasma.(2)A theoretical model has been proposed to study the ionized characteristics of the direct current glow discharge of argon. The plasma collective motion, collisions between particles, the interaction between the charged particles and the boundary are taken into account. Elastic, excitational, and ionizing electron-neutral collisions elastic, charge exchange ion-neutral collisions are included. The cross sections are the functions of particle's energy.(3)A three-dimensional particle-in-cell plus Monte Carlo collision(PIC/MCC) method is used. The simulation code is the original work. The FDM method is used to calculate the electric fields. The interaction between the charged particles and electric fields are described by particle-in-cell method. The collision processes and the behavior of charged particle which reach the boundary are treated with Monte Carlo method. And the advantages both PIC to plasma collective and MCC to collisions are obtained.(4)The detailed microscopic information about the distributions of charged particles and electric fields from the initial stage to the steady state of direct current discharge are obtained, and the spatio-temporal evolution of the movements of charged particles are shown. The macroscopic features of direct current discharge and direct current plasma are also found by the statistical treatment of the above microscopic information. The effects of neutral pressure and the external voltage on the characteristics of the direct current discharge and direct current plasma are investigated to make optimization of the direct current plasma.