The Theoretical Investigation Of The Transport Behaviors Of The Species In Nitrogen DC Glow Discharge Plasma

The transport behaviors of the electrons and the major heavy particles ( N2,N,Nf,N2f ) in the cathode fall region of Nitrogen direct current glow discharge have been simultaneously studied by Monte Carlo method, which can give a deep insight into the physical processes in the cathode fall of the direct current glow discharge. Considering the strongly back scattering of electrons from the negative region to the cathode fall region, the fast electrons are followed throughout the discharge space. The Monte Carlo method is also used to calculate the nitrogen atom density in an electron-beam-excited plasma (EBEP) operating at an ultralow pressure, which can present a better way for the synthesis of nitride materials. Furthermore, in order to investigate the fundamental characteristics of nitrogen direct current glow discharge, a self-consistent hybrid Monte Carlo-Fluid model is developed for the entire-space simulation of the nitrogen direct current glow discharge. Comparison has been made between the ion density calculated in the model and experimentally measured one to check the validity of the hybrid model. Calculations are also carried out for a range of voltages and pressures in order to investigate their influence on the calculated quantities.