The Reflection Metal Grating Disk Developed

The reflective metallic grating means have high reflectivtity stripe (as bright stripe)and low reflectivtity stripe (as dark stripe) on metallic plate. The reflective metallic grating have many merits corresponds to the glass grating, for example: antishock, antiradiation; But at the same time the reflective metallic grating exit some defects, for example: difficulty in manufacture process of metallic plate, complexity on metallic film, more difficulty on reproduction and so on.In this dissertation, the technologic process of reflective metallic grating was thorough studied with a statistically designed expment to parameterize technology parameter begins with key point unit technology, and obtain a complete set of technology parameter of manufacture on the reflective metallic grating. Base on these technology parameter, the reflective metallic grating disk was reproduced.The whole number of the line on this grating is 10800 line/pair and the middle diameter of this grating isφ130mm. The whole deviation of this reflective grating is 0.6"(RMS).Using this reflective metallic grating, we made a high precision reflective metallic coder whose precision is±2.8".