The Study Of Analyze The Fine Structure And Optical Parameters Of Porous Anodic Aluminum Oxide Thin Film With Elliptic Polarization Spectroscopy

Porous Anodic Alumina(AAO) film are widely used in various fields, covering biosensor pieces, photovoltaic devices, supercapacitors, optical waveguide devices, field enhancement device, photocatalysis, spectral enhancement detection with its own peculiar channel type micro-nano structure and regulation of optical parameters. Its internal structure parameters can be regulated by controlling the various parameters of the preparation conditions, at the same time, the internal structure parameters also determines the optical parameters of the material is apparent. Therefore, we can control the whole preparation process of AAO to realize the control of the structure of the thin film materials, Concrete containing film base material, electrochemical oxidation voltage, concentration of electrolyte composition and its size, environment temperature, oxidation time, etc. We need to combine with characterization methods to establish a direct linear relationship between the preparation conditions and material parameters to realize controllable parameters of membrane material preparation.The traditional analysis method is limited to scanning electron microscope(SEM) and atomic force microscopy imaging method for parameter analysis of thin film materials. In recent years, the elliptic polarization spectrum analysis technology has become increasingly apparent advantage in the field of film analysis with the improvement of computer technology, optics technology. Elliptic polarization spectrum analysis technology can be applied to thin film samples nondestructive contactless detection and get the sample information such as the fine structure, thickness, optically parameters at the same time. Compared to conventional imaging analysis characterization methods, the elliptic polarization spectrum analysis technology to get more comprehensive information, detection method is more efficient, compared with the scanning electron microscope and other microscopic detection means it has a wider area, so the average more meaningful sample parameters, this is very important for thin film materials characterization. In this paper, we study mainly the following three parts:(1) Combined with vacuum vapor deposition technology, steaming aluminum metallized film on glass substrate, and then preparation of glass substrate groove alumina membrane with a constant concentration of electrolyte, electrolyte, temperature conditions.by adjusting the change of oxidation potential and the thickness of the metal aluminium film, to produce samples with different structure and optical parameters analysis the sample internal fine structure parameters, including porosity, layer structure, film thickness With elliptic polarization spectral analysis technology. Get the internal structure of alumina film with 6 layer hierarchical description, and gives the structure information of each layer, put forward the glass substrate AAO have two different morphology of the porous layer by reasonable construction simulation(2)Get the film refractive index decision layer dispersion curve using elliptic polarization spectral fitting and structure parameter analysis.Make the linear relationship between refractive index and the preparation conditions.On this basis, prepared a planar optical waveguide sensor to meet the requirements of refractive index, thickness, and fine structure of glass substrate AAO.(3)Test the optical waveguide device performance of glass substrate AAO thin film through the finite difference time domain algorithm and self-built optical waveguide device test system, and made the experimental data to prove the reliability of elliptical polarization spectral fitting data.