Fabrication, Characterization Of Porous Anodic Alumina And Its Application In Fabrication Of Semiconductor Nanostructrued Materials

Porous anodic aluminiuma (PAA) has become the focus of current nanotechnology for its particular highly ordered nanostructures, anti-errosion, fine transparency and mechanical properties. In this paper, we will firstly introduce PAA's history and showcase main developments to present a full and accurate knowledge about PAA. Then, we systematically studied the PAA fabrication techniques. The Aluminium pre-treatments include annealing process and electrochemical polishing. The anodizing process was carried out at different electrolytes, various temperatures, different anodizing voltages and various electrolyte concentrations. Based on these investigations, we can well control the pore diameters (20-300 nm), interpore distances (50-600nm) and pore depths (100nm-200μm) of PAAs with highly ordered hexagonal nanopore arrays by the aid of electronic microscope technology.We also study the post-treatment of PAAs, such as removing the unoxided aluminium and barrier layer, broadening the pore size and...