Ultra Pure Water Systemic Monitor Realization And Fault Diagnosis

Along with foundation and grandness of semiconductor market, the capacity of supply semiconductor product line indispensable ultra pure water system became more and more important on ensuring yielding. At the present, produce ultra pure water's assorted advanced water treatment equipment, sometimes appearance some unpredictable fault, at the earliest people adopt fault diagnosis route is hand-labor method, by engineer or specialist by experience proceed estimation, or utilize special instrument proceed field survey succeed in analytical judgment, these approach at large complex system is unpractical. Therefore we want handgrip dam, artificial intelligence as well as pattern recognition wait subject technology held greet take fault diagnosis technology to become a relatively independence developmental technology, become practice wholesale complex system run procedure's credibility indemnification.At the first, the text analysis the produce spot craft theory and flow, adopt GE90 serial PLC to automation control establishment on ultra pure water system, introduce clearly systemic hardware compose and each control loop's control require as well as program flow diagram.Aim at ultra pure water monitored control system realizes adopt KingView6.5 software design interface, detail KingView6.5 design monitor interfacial course, reveal system detail drawing, alarm chart, accounting chart, graph and so on.As to control system, as is known to everyone NN, vague mathematics and so on these approach usually demand complicated count, and only in the information exactly and complete content outcome is found, but actually people found information sometimes inaccuracy, imperfection, and usually equipment one malfunction could incarnate at all characteristic signal, but during these signal presence redundant relation, possible through some or ounce characteristic signal with could completeness characterization the fault. Therefore sorts of new dispose blur and uncertainty mathematical tool roughness theory become more and more research personnel's attention.Roughness theory is one virtual instrument, mostly apply to data excavate, other region as blur roughness centralized control system, decision analysis system as well as medical decision making, expert system and so on aspect have application, but at fault diagnosis technology application not a great many. Therefore the text attempt to research roughness theory at ultra pure water system fault diagnose application, including foundation basic roughness theory model, as well as fault diagnosis systemic emulation experiment. After introducing roughness theory's basic conception and theory, utilize partial data precede preliminary RS modeling, sharpness matrices reduction and rule base foundation. In conclusion application VB software as fault diagnosis system development, as checking fault diagnostic system spanning feasible platform. Through the experimental data proceed emulation experiment, know clearly at guarantee classification capacity unaltered occasions redundant information's slake, depress computational effort and decrease uncertainty agential impact, at emulation interpretation and real production strung fault analysis compare, is substantial agreement, removal came off those redundant factor, fast found diagnostic results.