On A Power Supply Of A New Kind Of Ion Source

During the process of ion beam assisted deposition(IBAD), the charge build-up on the insulation film material influences the film quality. through the improvement of the broad beam cold-cathode ion source, the film surface charge accumulation phenomenon is eliminated by applying alternating voltage on extension polar.In this paper, the design method of the power supply of cold cathode ion source is designed, the power supply of the ion source extension polar is included:two direct current power modules, the full-bridge inversion module and main controller constituted by four IGBT. The alternation square ware voltage,which voltage amplitude and dutyfactor can be adjusted,can be generated through direct current modules supplying voltage to full-bridge inversion module and adjusting its trigger pulse width.The hardware part of power-supply system includes rectifying and wave-filtering circuit, voltage regulation and inversion circuit, drive and control circuit, protective circuit and so on. The power switching circuit, that master-switch power change device is IGBT module, supplies voltage to the load utilizing by the form of the full-bridge alternation topology circuit.In the software part, the control arithmetic of IGBT drive pulse dutyfactor and performance of single chip microcomputer STC12C5410 are studied. The STC12C5410 is the core part of power supply control circuit, in which the arithmetic of calibration voltage is presented by using STC12C5410 single chip microcomputer.moreover, the signal of power supply detection and over-voltage and over-current of system can be responded fleetly to guarantee the power supply to work reliably and stably.The experimental result shows that the power supply can work well and the neutralization effect of ion and electron on the film surface can be achieved by the improved cold-cathode ion source...