Study Of Calibration System For High Measuring Range Six-Axis Piezoelectric Force Sensor

The giant heavy-load operation equipment is the basic equipment in manufacturing industry chain, which embodies a country's ability of extreme manufacture. During the operational process of heavy-load operation equipment, measurement of six-axis force and real-time force feedback is the base of cooperative operation control and conformable control of multiple equipments. Six-axis force sensor is the core part of the measurement system, six-axis force sensor based on piezoelectricity effect has a good ability of testing space force. It takes the accurate calibration as prerequisite before practical application. Therefore, it is of great significance to studying the calibration system for the six-axis force sensor.This project is funded by the National Natural Science Foundation of China (No. 2006CB705406). From the application aspect of engineering, a kind of calibration system with high measuring range is studied to satisfy the coupling characteristic of the piezoelectric force sensor and the measurement requirements of the giant heavy-load operation equipment.In this paper, worm and sliding spiral mechanism are used to combine into force supplier. Worktable with T groove is designed to achieve the moving of the force supplier in the horizontal direction, and lifting mechanism controls the lifting of the force supplier in the vertical direction, which is fixed on the lifting board. Calibration equipment which can calibrate three-axis force sensor is established. At the same time, the result of finite element analysis and calculation check for the major components of the equipment proves good reliability of the calibration equipment. According to the moving and turnover of the six-axis piezoelectric force sensor, the corresponding connecting frame is designed and the calibration mode for six-axis force sensor is studied. Output devices are selected to complete the design of the calibration system. Therefore, six-axis calibration system with huge measuring force range to 50000N and huge measuring space range to 560×520×520mm is studied.The uncertainty of the calibration system is analyzed and calculated through experiment in the article, and the result shows the system has a good ability of loading with low uncertainty. It meets the requirements of the calibration of the sensor very well, and provides a reliable basis for the sensor's practical application.