Finite Element Simulation Analysis And Design Of A Four-Axis Piezoelectric Force Sensor

With the processing ability of the computer becoming more quickly, the numeric simulation method is widely used in the area of the engineering. At present, the numeric simulation method which is often used includes: finite element method, finite difference method, boundary element method and discrete element method. And FEM(finite element method) has strong practicability and broad application. In this paper, for developing a new four-axis piezoelectric force sensor, through simulation by using FEA (finite element analysis) software ANSYS, the static and modal characteristics of the sensor have studied. Through optimization design, the influence of the elastic film on the performance of the sensor has researched. The main work completed includes:Firstly, know of the development situation of the multi-axis force sensor and the application of FEA in the design of the multi-axis force sensor.Secondly, quartz has been chosen as the sensing element and four-direction forces can be measured without coupling interference. The basic structure of a four-axis piezoelectric force sensor has been designed.Thirdly, introduce the basic concept of FEA, the theory of the optimization design, as well as the simulation and optimization to research the basic performance and influence of the sensor by using FEA.Fourthly, by using FEA, the static and modal performance indexes such as sensitivity, coupling interference, translation efficiency and natural frequency have been gotten. The result has proved the rationality of the design.Fifthly, through the optimization design, research the influence of the elastic film design on the performance of the sensor.The research work has provided an important foundation for developing a new four-axis piezoelectric force sensor.