Research On Preparation And Properties Of TiO₂ Films

In many semiconductor catalyst,TiO2 as a commonly semiconductor catalytic material has has characteristics of high catalytic activity,oxidative capacity and high stability.Since the environment in the whole world deteriorates,using TiO2 Photocatalysts to purify environment is emphasized.Current application is focused on the pourfication and the treatment of water and air,However,there exist many defects in the use of conventional powder photocatalysts,such as stirring during the proeess,Segregating after the reaction and so on.TiO2 film photocatalysts can be used to overcome these defects and extend its industrial application.Present method used to prepare TiO2 films mostly includes sol-gel method.The films prepared by this method are need heat treatment, then films have the characteristics of photocatalytic activity.In order to solve the films quality problem in traditional sol-gel method, this paper aims at the research of TiO2 films prepared on the soda lime glass (SLG) substrates by direct current pulse magnetron sputtering (DCPMS) at room temperature. The growth feather, microstructure, surface roughness,optical and electrical properties of TiO2 films with the change of argon pressure, pulse power and target-substrate distance have been characterized by Stylus Profiler,X-Ray Diffractometer,Atomic Force Microscopy,Four-probe Resistivity Meter and UV-Vis Spectrophotometer respectively.The research results show that:1. In the other conditions remain unchanged,as the O2/Ar gas flow ratio increase,the TiO2 film deposition rate reduce monotony,quality of the crystal become better,diffraction peak of anatase(101) increased gradually.Particles of surface are growing,the contact angle of water to continuously reduce.Degradation rate with methyl orange increased first and then decreased.when O2/Ar=6/14, degradation rate become maximum.2. In the other conditions remain unchanged,as the working pressure increase,the TiO2 film deposition rate reduce monotony,quality of the crystal become better,diffraction peak of anatase(101) increased gradually.At the same time, when the working pressure is high.TiO2 film has loose structure,irregularity surface,and high surface area.Degradation rate with methyl orange increased.Particles of surface are growing,the contact angle of water to continuously reduce.Degradation rate with methyl orange increased first and then decreased.when O2/Ar=6/14,degradation rate become maximum.The hydrophilic properties become better.