<sub> Of Sno 2 </ Sub> Thin-film Gas Sensor Preparation And Its Performance Study

SnO₂ is a kind of wide-band semiconductor material, the band gap of which is 3.67 eV at room temperature. It has good chemical stability and optical anisotropy. It has been widely applied in many fields such as solar cells, liquid crystal display, anti-static coat, electric heating devices, transparent electrodes, and gas sensors, etc. due to its excellent properties, i.e., wide-band gap, high transparency in visible region, low resistivity and high stablility. SnO₂ is a kind of broad spectrum gas sensitivity material, it can be used to examine each kind of gas which is virulent, harmful and ignitable, has the extremely broad applied prospect.In this article, the preparation technology, property and application of SnO₂ were introduced. In this text experiments, SnO₂ thin films were fabricated by magnetron sputtering, and make use of the atom dint microscope(AFM), X-ray diffraction(XRD) to the thin films. Through the analytical enunciation of XRD, express that the thin films choose excellent mindset is (110) and (211) direction, the thin film of SnO₂ is everywhere the rutile structure. The craft calcination temperature has very big influence to the function of the thin film, the difference is in the air of calcination temperature of 150℃, 200℃, 250℃, 300℃, 350℃and 400℃. Analyze the influences at different calcination temperature. pass the AFM we can see that the size of the crystal is goes up along with the calcination temperature.and we also can see that, this technique is a kind of which the speed to sank to accumulate higher, the work air pressure lowery sputter technique, have its special and superior.It was found that resistance-temperature characteristics were different for different gases. The characteristic results of sensitivity, temperature, response time and recovery time of thin film were given. The sensing mechanism for gas sensor of SnO₂ thin film was also discussed.