Theory And Technique Research Of ZnO Surface Acoustic Wave And Silicon-Based SiO₂ Optical Wave-Guide Acousto-Optical Frequency Shifter

Optical gyroscope is based on Sagnac effect, the use of advanced integrated optical technology to develop a new type of optical gyroscope.Development of optical gyroscope is the key to using frequency modulation to achieve servo frequency, the main errors effectively and achieve high-precision Sagnac frequency difference measurement. Acousto-optical frequency shifter is the key to solve the technical core of integrated optical devices. For integrated optical gyroscope on the Acousto-optical frequency shifter of the diffraction efficiency requirements, the paper studied the theory and technique research of ZnO surface acoustic wave and silicon-based sio2 optical wave-guide acousto-optical frequency shifter. According to the general theory of acousto-optical interactions, we detailedly discuss the principle of acousto-optical frequency shifter, devise the operation mode of the acousto-optical interaction, determine the design parameter of the device and carry out the develop of the devise. The parameters of the devise that we deigned are: drive power 1W, diffraction efficiency 5%, frequency shifter dimension±300KHz at acoustic wave center frequency 200MHzBecause the SAW-AOFS is complex,it is very difficult and expensive to monolithic integrated. The acousto-optical frequency shifter of chip is silicon-based sio2, using Y branch con-sisting of rectangular waveguide Mach-Zehnder beam path, in its double-wall by the piezoelectric ZnO films constitute a surface acoustic wave (SAW) IDT. In this paper, high quality ZnO films grown by vacuum sputtering onto SiO2 optical wave-guide as a method of fabrication the IDT. It performs a good performance as zero coefficient and high electromechanicl coupling ratio,which can improve the stability,flexibility and anti-interference of the beam path. Give the parameter of fabrication the IDT.