Based On The Silicon-Based Waveguide And Acousto-Optic Frequency Shifter That The Research Of The Theory And Technology

Acousto-optical frequency shifter is the core of integrated optical devices which the development of optical gyroscope to achieve high-precision Sagnac frequency measurement. For optical gyroscope on the Acousto-optical frequency shifter of the diffraction efficiency requirements, the paper studied the theory and technique research of silicon-based SiO2 optical wave-guide acousto-optical frequency shifter.In this paper, according to the general theory of acousto-optical interactions, we detailedly discuss the principle of acousto-optical frequency shifter, devise the operation mode of the acousto-optical interaction and determine the design parameter of the device, finally carry out the development of the devise.The acousto-optical frequency shifter of chip is silicon-based SiO2, in its double-wall by the piezoelectric ZnO films constitute a surface acoustic wave (SAW) IDT. In order to achieve stronger adsorbability between ZnO film and the substrate, we used the vacuum magnetron sputtering to produce the film, utilized lithography method to preparation interdigital electrode. Design all the parameters to ensure the acousto-optic devices for optical gyroscope signal detection work.